Abstract:Magnetron sputtering is the preferred method to prepare metal coatings. The microspheres need to maintain a high fluidization state when the microspheres are coated. The fluidization state of microspheres is affected by structural and operational parameters of the deposition chamber. DEMSLab software was used to numerically simulate the internal structure, vibration interval, surface roughness, rotation speed, mixing ball ratio and other factors of the deposition chamber. The results show that the mixing effect of the triangular plate is better than that of the cylinder chamber. The increase of the number of macrospheres contributes to the uniform distribution of fuel microspheres. Reasonable rotation speed and roughness make the distribution of fuel microspheres best. Subsequently, the multi-variable coupling study of equipment parameters and operating parameters can be carried out to make the particle distribution in the deposition chamber uniform.