Abstract:Effects of heating rate, holding time, and sintering temperature of liquid phase sintering on properties of AlN ceramic substrate were studied. Warpage degree of samples at different heating rates of liquid phase sintering was measured to determine the optimum heating rate range of 0.2~0.5 ℃/min. The optimum holding time is 5 h and the maximum sintering temperature is 1 830 ℃ according to change of sample density with different holding time. The sintering curve after optimization has greater effect by comparing performance and microstructure of AlN ceramic substrate before and after optimization.