Abstract:Fluorine-containing and ceria-based rare earth polishing powder with small median particle diameter was prepared with carbonate lanthanum cerium as precursor by the processes including fluorination of hydrofluoric acid, high temperature calcination, mechanical stirring and grinding. The results show that the solid solution in product has a structure of cubic fluorite. With the increase of fluorine content, LaOF phase with tetragonal structure starts to precipitate, CeO2 characteristic peak shifts to right and density of powder is improved. Moreover, the polishing performance for optical glass reaches the maximum value when the fluorine content is 6%, and the surface smoothness of the material declines with the increase of fluorine content.